Wafer surface reconstruction from top-down scanning electron microscope images

E Gelenbe, T Koçak, R Wang

Research output: Contribution to journalArticle (Academic Journal)

19 Citations (Scopus)
Original languageEnglish
Pages (from-to)216 - 233
Number of pages18
JournalMicroelectronic Engineering
Volume75 (2)
DOIs
Publication statusPublished - Aug 2004

Bibliographical note

Publisher: Elsevier

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