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Wafer surface reconstruction from top-down scanning electron microscope images

Research output: Contribution to journalArticle

  • E Gelenbe
  • T Koçak
  • R Wang
Original languageEnglish
Pages (from-to)216 - 233
Number of pages18
JournalMicroelectronic Engineering
Volume75 (2)
DOIs
DatePublished - Aug 2004

Additional information

Publisher: Elsevier

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