| Translated title of the contribution | What is the ultimate precision of CBED structure factor measurements? Application to Group IV and III-V semiconductors |
|---|---|
| Original language | English |
| Pages (from-to) | 144 - 145 |
| Journal | Proceedings: Microscopy and Microanalysis |
| Volume | 1995 |
| Publication status | Published - 1995 |
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