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Diamond synthesis by chemical vapour deposition (CVD) from carbon-containing gas mixtures has by now long been an industrial reality, but commercial interest and investment into the technology has grown dramatically in the last several years. This Feature Article surveys recent advances in our understanding of the gas-phase chemistry of microwave-activated methane/hydrogen plasmas used for diamond CVD, including that of added boron-, nitrogen- and oxygen-containing dopant species. We conclude by considering some of the remaining challenges in this important area of contemporary materials science.
Alternative Excitation Mechanisms Occurring within Microwave-activated Plasmas under Conditions Relevant to the Chemical Vapour Deposition of DiamondAuthor: Mahoney, E. J. D., 1 Oct 2019
Student thesis: Doctoral Thesis › Doctor of Philosophy (PhD)File