What [plasma used for growing] diamond can shine like flame?

Michael N R Ashfold, Edward J D Mahoney, Sohail Mushtaq, Benjamin S Truscott, Yuri A Mankelevich

Research output: Contribution to journalReview article (Academic Journal)peer-review

16 Citations (Scopus)
609 Downloads (Pure)

Abstract

Diamond synthesis by chemical vapour deposition (CVD) from carbon-containing gas mixtures has by now long been an industrial reality, but commercial interest and investment into the technology has grown dramatically in the last several years. This Feature Article surveys recent advances in our understanding of the gas-phase chemistry of microwave-activated methane/hydrogen plasmas used for diamond CVD, including that of added boron-, nitrogen- and oxygen-containing dopant species. We conclude by considering some of the remaining challenges in this important area of contemporary materials science.
Original languageEnglish
Pages (from-to)10482-10495
Number of pages14
JournalChemical Communications
Volume53
Early online date20 Aug 2017
DOIs
Publication statusPublished - 21 Sept 2017

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