Measurement and simulation of ion energy distributions in a reactive ion etcher.

  • Andrew C Dickenson

Student thesis: Doctoral ThesisDoctor of Philosophy (PhD)

Abstract

Date of Award1994
Original languageEnglish

Keywords

  • Semiconductor etching

Cite this

Measurement and simulation of ion energy distributions in a reactive ion etcher.
Dickenson, A. C. (Author). 1994

Student thesis: Doctoral ThesisDoctor of Philosophy (PhD)