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High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
Subtitle of host publication2018, 29 July–3 August, Hong Kong, China
Publisher or commissioning bodyOptical Society of America (OSA)
Number of pages2
ISBN (Electronic)9781943580453
DOIs
DateAccepted/In press - 11 May 2018
DatePublished (current) - 25 Apr 2019
Event2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 - Wanchai, Hong Kong
Duration: 29 Jul 20183 Aug 2018

Conference

Conference2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
CountryHong Kong
CityWanchai
Period29/07/183/08/18

Abstract

We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10 6 at 1547.6 nm, and >0.8×10 6 throughout 1500-1600 nm.

Event

2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

Duration29 Jul 20183 Aug 2018
CityWanchai
CountryHong Kong
SponsorsNanosystem Fabrication Facility (NFF) (External organisation), Santec (External organisation), The Hongkong University of Science and Technology (External organisation), Universal (External organisation)

Event: Conference

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